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Silicon Wafer Carrier Manufacturing at Juxiang
Gansu Juxiang Fluoroplastics Technology Co.,Ltd. is a Silicon Wafer Carrier manufacturer serving wafer fabs, wet-bench integrators and semiconductor equipment builders. We produce wafer-handling components in PFA, PEEK and PP from our plant in Yumen City, Gansu Province, with a second production base in Zhejiang.
The range covers PFA flower baskets for 2 to 8 inch wafers, PEEK flower baskets, PFA baskets, and PP flower-shaped plates, bottles and trays supplied with matching packaging boxes. Each carrier is built to the wafer size, slot pitch and tool interface of the line it serves, not to a single stock pattern.
- Wet processing: immersion baskets for cleaning, etching, rinsing and drying steps
- Handling and inspection: open baskets and plates for manual or automated transfer
- Storage and shipping: PP plates, bottles and trays with fitted packaging boxes
Our Carrier Range and Where Each Type Fits
The eight carrier families below cover the wafer sizes most commonly specified in semiconductor front-end and back-end lines. Material, slot count and external geometry are confirmed against the process and the handling equipment before production.
| Carrier type | Material | Wafer size | Typical fit | Configuration notes |
|---|---|---|---|---|
| PFA Flower Basket 2-inch / 3-inch | PFA | 2 in, 3 in | Wet-bench cleaning, etching and rinsing of small wafers | Slot count and pitch set by wafer thickness and gripper clearance |
| PFA Flower Basket 4-inch / 5-inch | PFA | 4 in, 5 in | Batch wet processing and transfer between tanks | Handle and drain geometry matched to tank and cassette layout |
| PFA Flower Basket 6-inch / 8-inch | PFA | 6 in, 8 in | Large-diameter wafer cleaning and inspection | Reinforced base and slot ribs for load stability |
| PFA Basket | PFA | Project-specific | General immersion processing and parts handling | Open basket format for multi-wafer immersion |
| PEEK Flower Basket | PEEK | Project-specific | Repeated handling, hot processes, slot geometry retention | Higher stiffness and wear resistance at contact points |
| 5-inch PP Flower-Shaped Plate + Packaging Box | PP | 5 in | Storage, shipping and incoming inspection | Supplied with a matching packaging box |
| 6-inch PP Flower-Shaped Bottle + Packaging Box | PP | 6 in | Storage and transport of single wafers | Bottle format with fitted box |
| PP Trays 2-inch, 3-inch, 4-inch | PP | 2 in, 3 in, 4 in | Tray-based storage and line-side handling | Stackable tray format |
PFA, PEEK or PP: Matching the Carrier to the Process
Material choice follows the chemistry, temperature and mechanical duty of the carrier. We review the cleaning sequence and handling method before recommending a resin, because the same wafer size can require very different carriers in a wet bench and in a shipping department.
- PFA: the standard choice for wet benches. Smooth surfaces, broad resistance to cleaning acids and oxidizers, service at elevated temperatures, and enough translucency to confirm wafer seating.
- PEEK: selected where slot geometry must hold under repeated handling, where contact points wear, or where higher stiffness and dimensional stability are needed. PEEK carriers are opaque.
- PP: economical for storage, shipping and less aggressive chemistries. PP plates, bottles and trays are supplied with packaging boxes for outgoing wafer logistics.
Where a line uses several chemistries, we can produce the same carrier geometry in more than one material so that process and logistics carriers share handling dimensions.
Wafer Size, Slot Geometry and Handling Interface
Slot design determines how the wafer sits, drains and releases. We set slot pitch, seating depth and edge contact area from the wafer thickness, the robot or manual gripper, and the drain path required after immersion.
- Wafer diameter and thickness, including notch or flat orientation
- Slot count, pitch and parallelism across the full stack
- Seating depth and contact band so the wafer is supported without edge damage
- Drain and vent openings sized for the rinse and dry cycle
- Handle position, stacking height and clearance for gloves or end effectors
- Interface with cassettes, load ports, tank fixtures and packaging boxes
Critical Specifications We Confirm Before Production
Every carrier is produced from an approved drawing. The specification list below is the working basis for the quotation, the machining or molding program and the inspection record.
- Overall dimensions, flatness and base stability
- Slot pitch, slot width and slot depth with stated tolerances
- Surface finish and edge break on wafer contact areas
- Material grade and any filler or color requirement
- Chemical exposure list and maximum service temperature
- Cleaning and re-cleaning compatibility, including hot DI water and process acids
- Marking, traceability and packaging method
Manufacturing, Inspection and Documentation
PFA and PEEK carriers are machined from rod and sheet, which allows slot geometry and external features to be produced to the drawing without mold tooling. PP plates, bottles and trays are produced in series with matched packaging boxes. Our fluoroplastic product range includes the PEEK Products and PFA stock used across these carriers.
Inspection is performed against the approved drawing, and the record format is agreed at order stage. Documentation covers material identification, dimensional results and handling guidance; packaging is specified to protect slot edges during transport.
Information We Use to Configure Your Solution
A workable proposal needs the operating point, not only a wafer size. The table shows the inputs that most affect carrier design and price.
| Project input | What it determines |
|---|---|
| Wafer diameter, thickness and orientation | Slot pitch, seating depth and overall carrier envelope |
| Process chemistry and temperature | Material selection and cleaning compatibility |
| Equipment interface | Handle, base, stacking and robot clearance |
| Slot count per carrier | Batch size, carrier height and load stability |
| Handling method | Edge contact area, grip clearance and weight target |
| Quantity and repeat order pattern | Machining or molding route and production scheduling |
| Drawing, sample or reference part | Dimensional basis and inspection plan |
| Packaging and marking requirements | Box format, labeling and delivery scope |
Frequently Asked Questions
Which carrier material suits a wet bench using aggressive cleaning chemistry?
PFA is our standard recommendation for immersion cleaning, etching and rinsing because it combines broad chemical resistance with a smooth, low-contamination surface and good visibility of seated wafers. We confirm the specific chemistry list and service temperature before releasing the material.
Can you produce an 8-inch carrier with a non-standard slot pitch?
Yes. PFA and PEEK carriers are machined to the approved drawing, so slot count, pitch, depth and external features can follow your existing cassette or tool interface. We need the wafer thickness, required slot count and a drawing or sample to set the program.
Do the PP carriers include packaging boxes?
The 5-inch PP flower-shaped plate and the 6-inch PP flower-shaped bottle are supplied with matching packaging boxes. PP trays for 2, 3 and 4 inch wafers are supplied as stackable trays, and box formats can be agreed for other carrier types.
What do you need to quote a wafer carrier project?
Send the wafer size and thickness, process chemistry and temperature, slot count, equipment interface, quantity and any drawing or reference part. With those inputs we confirm material, geometry, inspection scope and packaging in the quotation.
Related Products and Categories
Our portfolio also includes Modified PTFE Gasket for applications with different operating ranges, interfaces or integration requirements.
